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KF-16 High Vacuum Metering Valve
Information
High vacuum metering valves
Are used to vent or release pressure/vacuum or to control gas flows. Precise flow rate is set by adjusting the dial. Great for controlling the exact flow rate into or out of the system for:
- adjusting the vacuum level.
- adjusting vacuum flow speed.
- back filling with inert gas.
- safe and gradual release of vacuum.
- stabilizing vacuum controlling system.
Specs
| Minimum flow rate | 0.003 L/s (for 0.8mm), 0.005 L/s (for 1.2mm) |
| Maximum flow rate | 0.03 L/s (for 0.8mm), 0.08 L/s (for 1.2mm) |
| Minimum Adjustable Flow | 0.003 SCCM |
| Maximum inlet pressure | 900 torr |
| Maximum leak rate across body | 7.5 x 10-9 torr·L/s |
| Cycles until first service | 3000 |
| Vacuum connection: | KF-16, NW-16 |
| Position of installation: | Any |
| Material | Stainless steel (SS316) body, Brass needle |
| Maximum Bake out Temperature | ≤150℃ |
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